Atmel Clean Room Process Exhaust

This project involved the design of process heat exhaust systems to serve equipment in two separate class 100 clean rooms. The existing clean rooms had air handling units with supply air ductwork above the ceiling supplying air to HEPA filter panels. Return air was transferred back to the air handling units through utility tunnels.

The design involved separate exhaust systems for each clean room designed to exhaust 14,000 CFM and 18,000 CFM with redundant exhaust fans on each system. Approximately 20,000 CFM was removed from the scrubber exhaust system, allowing for future expansion on each system. This was a fast-track project in which performance requirements were provided to the owner to pre-purchase exhaust fans and ductwork while contractors were bidding the installation phase.

The project also involved design to expand a wet scrubber exhaust system to serve equipment in a class 100 clean room. The clean room utilized a supply air plenum above the ceiling with a return air plenum below the floor. FRP ductwork was utilized in the mechanical room and on the roof. Lined stainless steel ductwork was utilized in the return air plenum for flexibility in connecting equipment to the system.

The design was developed to accommodate present and future requirements for an additional 20,000 CFM, of which 8,000 CFM capacity was required for new equipment on order. This was a fast-track project in which a ductwork layout was provided to the owner to pre-purchase ductwork while contractors were bidding the installation. The project was completed in approximately 75 days from design start to end of construction.